Multi-Row Guiding Template Design for Lamellar Directed Self-Assembly with Self-Aligned Via Process
Journal
ACM Transactions on Design Automation of Electronic Systems
Series/Report No.
ACM Transactions on Design Automation of Electronic Systems
Journal Volume
30
Journal Issue
2
Start Page
1
End Page
17
ISSN
1084-4309
1557-7309
Date Issued
2025-02-07
Author(s)
SDGs
Publisher
Association for Computing Machinery (ACM)
Type
journal article