SPM Technology for Machining Tree-Dimensional Nano Patterns
Date Issued
2006
Date
2006
Author(s)
Mao, Yao-Ting
DOI
zh-TW
Abstract
This thesis addresses the 3-dimensional scanning probe microscope (SPM) lithography. Previous researches have shown that servo control imposes significant effect on the behavior of the piezo-electric actuators used in the SPM system; however, there is very little discussion on the dynamics of sample material and lithography effect. This paper points out that the debris can be push and squeezed by the properly controlling the relationship between the probe and the sample. The thesis shows that an appropriate multi-dimensional lithography algorithm is essential to good 3D lithography and discusses the corresponding effects. This paper also addresses the more concrete lithography results by special algorithm. The design procedure for a model reference controller is also presented to achieve dynamic matching among different axes. The experimental results confirm the design specifications.
Subjects
掃描式探針顯微鏡
壓電材料
SPM
PZT
Model reference control
Type
thesis
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