Modeling on Dressing Effects in Chemical Mechanical Polishing with Diamond Dressers
Resource
International Journal of Abrasive Technology,0(7),175-180.
Journal
International Journal of Abrasive Technology
Journal Volume
0
Journal Issue
7
Pages
175-180
Date Issued
2009
Date
2009
Author(s)
Chen, K.R.
Young, H.T.
Type
journal article