A novel fabrication method for suspended high-aspect-ratio MEMS structures

Resource

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Journal

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems

Pages

-

Date Issued

2005-06

Date

2005-06

Author(s)

Kuo, Wen-Cheng

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

01497274.pdf

Size

675.49 KB

Format

Adobe PDF

Checksum

(MD5):e21bc59c50230bf607517cbf47327cde