Computational Study of the Effect of Finger Width and Aspect Ratios for the Electrostatic Levitating Force of MEMS Combdrive
Resource
Journal of Microelectromechanical Systems 14 (2): 305-312
Journal
Journal of Microelectromechanical Systems
Journal Volume
14
Journal Issue
2
Pages
305-312
Date Issued
2005
Date
2005
Author(s)
Liao, Y.S.
Chyuan, S,W.
Chen, J.T.
Type
journal article
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40.pdf
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1.04 MB
Format
Adobe PDF
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