Nanoimprint technology for patterning functional materials and its applications

Journal

Microelectronic Engineering

Journal Volume

132

Pages

98-119

Date Issued

2015

Author(s)

Yu, C.-C.

Chen, H.-L.

DOI

10.1016/j.mee.2014.10.015

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491291

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84908430828&doi=10.1016%2fj.mee.2014.10.015&partnerID=40&md5=8cec5ec80fd0c7c28b1f5fa4e0af9de3

Type

journal article