極高壓力振幅驅動器之設計 (1/3)
Date Issued
2002-07-31
Date
2002-07-31
Author(s)
DOI
902212E002228
Abstract
first year of this three-year project with the
overall aim to study and fabricate a
high-pressure amplitude device for micro
device pumping and valve applications.
The first year effect has been focused on
the preliminary study and design of a resonator
chamber to amplify the initial pressure
fluctuation. Several designs are current under
serious considerations. Concepts studied
include Resonate macrosonic synthesis (RMS),
Helmholtz resonator design, tuned resonator
design, electrostatic actuation. Pros and cons
are discussed. The design will be fabricated
using an elastomer material,
poly(dimethylsiloxane) (PDMS), which offers
substantial advantages over traditional
silicon-based processes.
Publisher
臺北市：國立臺灣大學應用力學研究所
Type
report
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