Carbon Nanotube Forest for Wide Range Temperature Sensor
Date Issued
2008
Date
2008
Author(s)
Tsou, Yung-Han
Abstract
Carbon nanotube (CNT) forest is taken as the central element of a new temperature sensor device in this thesis and we measure the lateral resistance of CNT forest in the range of temperature measurement is from 24~800℃. First of all, the CNT forests are grown by CVD (Chemical Vapor Deposition) in different geometric shapes and are bonded on nonconducting substrates. After moved, the length、width、height of CNT forests are observed by SEM (Scanning Electron Microscope), then the device is heated by using three-zone temperature furnace. In the period of heating, the temperature and lateral resistance of CNT forest are recorded by hand and Semiconductor parameter analyzer (Aligent HP 4156C). Finally the room temperature resistivity and TCR (Temperature Coefficient of Resistance) of CNT forest are calculated. It is obtained that the lateral room temperature resistivity of CNT forest is about 1469.067 mΩcm and there is a close relation between the temperature and resistance of CNT forest and the curves of R(T)/Ro seem to be the same after the CNT forest is pretreated .The mean TCR of CNT forest is -0.0671%/℃ and has no relation with the geometric shapes of CNT forest and the CNT forest temperature sensor is compatible to be used in 150~550℃.
Subjects
CNT forest
temperature sensor
TCR
lateral resistivity
furnace
Type
thesis
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