First Demonstration of Multi-VT Stacked Ge0.87Sn0.13 Nanosheets by Dipole-Controlled ALD WNxCy Work Function Metal with Low Resistivity and Thermal Budget ≤ 400 ℃
Pages
2021-June
Date Issued
2021
Author(s)
Publisher
Institute of Electrical and Electronics Engineers Inc.
Type
conference proceedings