The design of a coplanar precision XY-stage

Resource

Proc. Of the 6th International Conference on Frontiers of Design and Manufacturing (ICFDM), Xi’an China(2004.6)

Journal

Proc. Of the 6th International Conference on Frontiers of Design and Manufacturing (ICFDM), Xi’an China(2004.6)

Pages

-

Date Issued

2004-06

Date

2004-06

Author(s)

Fan, Kuang-Chao

Wang, Weili

URI

Type

conference paper