Digitally-specified micromechanical displacement amplifiers
Journal
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages
781-784
Date Issued
2009
Author(s)
Abstract
A micromechanical displacement amplifier comprising two asymmetric resonator array composites coupled by a quarter-wavelength beam has been demonstrated that permits specification of gain factor by mere (digital) selection of an appropriate ratio of the number of resonators in an input array to that in an output array. Like the method, this displacement gain circuit is a key enabler for resoswitch-based mechanical power amplifiers and power converters, because it can prevent unwanted drive electrode-to-resonator impact in such circuits. This design, however, differs from that in that 1) it can be applied to radial-contour mode disks that can achieve much higher frequency than the wine-glass disks; 2) it preserves the frequency and Q of its constituent resonators (whereas the method of changed the frequency and lowered the Q); and 3) its digital method for gain specification is much more straightforward, accurate, and repeatable.
SDGs
Type
conference paper