Nanoscale inhomogeneity and photoacid generation dynamics in extreme ultraviolet resist materials

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

10586

Pages

105861O

Date Issued

2018

Author(s)

Wu, P.-J.

Wang, Y.-F.

Chen, W.-C.

Wang, C.-W.

Cheng, J.

Chang, V.

Chang, C.-Y.

Lin, J.

DOI

10.1117/12.2316308

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047801895&doi=10.1117%2f12.2316308&partnerID=40&md5=f91fa40082441b62db23b7effe9f7f96

https://scholars.lib.ntu.edu.tw/handle/123456789/407273

Type

conference paper