Study of a miniature air bearing linear stage system

Resource

PROGRESS ON ADVANCED MANUFACTURE FOR MICRO/NANO TECHNOLOGY 2005, PT 1 AND 2,505-507,13-18.

Journal

PROGRESS ON ADVANCED MANUFACTURE FOR MICRO/NANO TECHNOLOGY 2005

Pages

-

Date Issued

2006-05

Date

2006-05

Author(s)

Fan, K. C.

Yen, R. H.

Ho, C. C.

URI

Type

journal article