Batch Sequencing for Run-to-Run Control:  Application to Chemical Mechanical Polishing

Resource

Industrial & Engineering Chemistry Research 44 (13): 4676-4686

Journal

Industrial & Engineering Chemistry Research

Journal Volume

44

Journal Issue

13

Pages

4676-4686

Date Issued

2005

Date

2005

Author(s)

Chen, Yih-Hang

Su, An-Jhih

Shiu, Sheng-Jyh

Yu, Cheng-Ching

Shen, Shih-Haur

URI

Type

journal article

File(s)

Name

42.pdf

Size

409.37 KB

Format

Adobe PDF

Checksum

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