Metal micromechanical filter-power amplifier utilizing a displacement-amplifying resonant switch
Journal
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages
2469-2472
Date Issued
2013
Author(s)
Type
conference paper
