A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor

Resource

Tamkang Journal of Science and Engineering 7 (2): 61-66

Journal

Tamkang Journal of Science and Engineering

Journal Volume

7

Journal Issue

2

Pages

61-66

Date Issued

2004

Date

2004

Author(s)

Lee, Chi-Yuan

Chen, Yung-Yu

Chen, Wen-Jong

Pao, Shih-Yung

Yen, Kai-Hsiang

Xiao, Fu-Yuan

URI

Type

journal article