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College of Engineering / 工學院
Materials Science and Engineering / 材料科學與工程學系
Structural investigation of ZnO:Al films deposited on the Si substrates by radio frequency magnetron sputtering
Details
Structural investigation of ZnO:Al films deposited on the Si substrates by radio frequency magnetron sputtering
Journal
Thin Solid Films
Journal Volume
545
Pages
183-187
Date Issued
2013
Author(s)
Chen, Y.Y.
Yang, J.R.
Cheng, S.L.
Shiojiri, M.
JER-REN YANG
DOI
10.1016/j.tsf.2013.07.079
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/491565
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84884984387&doi=10.1016%2fj.tsf.2013.07.079&partnerID=40&md5=1fc3b3416b1ccc3966df07e6f5196d0b
SDGs
[SDGs]SDG7
Type
journal article