Electrocoagulation on CMP Wastewater Treatment and The Behavior of Particle Coagulation
Date Issued
2005
Date
2005
Author(s)
Liu, Yi-Hung
DOI
zh-TW
Abstract
This thesis on separation between nano-particles and water in CMP wastewater by electrocoagulation has been mainly studied in five parts. The surface properties and behavior on coagulation of particles changing with various conditions were investigated in the first part of the study. Particle’s interactions were simulated and verified by DLVO modeling in the second part. Treatment efficiency affected by some important parameters and kinetic reaction modeling in the electrcoagulation process were investigated in the third and the forth part respectively. Optimization in the electrocoagulation process by experimental design was investigated in the final part of the study.
According to the experimental results, I prefer to add MgCl2 for higher wastewater concentration to avoid passivation in the latter electrocoagulation(EC) process in CMP wastewater treatment. In addition, the left chloride anion was beneficial in the latter EC process. The behavior on coagulation between particles in CMP wastewater is more complicated than assessed by DLVO theory and it is more important on parameters controlling in the EC process.
It was found aeration, current density, and pH controlling after EC treatment are necessary in the EC process and almost 99％ of particle removal efficiency was achieved by proper conditions in the treatment. It was also found particles and Fe3+ ions react in the first main reaction and then particles coagulate together rapidly in the second reaction by the kinetic modeling. Finally, the optimum parameters were determined by experimental design and the optimum parameters in the EC treatment including : 0.0455 A/cm2, 11.3 minutes during EC treatment, and pH controlling between 5~6 after EC treatment.
Subjects
化學機械研磨廢液
電混凝
顆粒間的作用行為
顆粒移除
CMP wastewater
electrocoagulation
particle removal
Type
thesis
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