Research on a DLP-Based Image Fiber Stereomicroscope
Date Issued
2006
Date
2006
Author(s)
Chang, Pei-En
DOI
zh-TW
Abstract
As the minimization of electric components spreads out, optical measurement techniques are developed toward micro-scale profile measurement. This research is proposed to construct a prototype of high flexibility precision 3D measurement system, Image Fiber Stereo Microscopy, for the purpose of profile and dimension of micro components. It provides the concept and system design of micro 3D reverse engineering.
On the basis of the principle of structured light and phase shifting, a novel digital stereomicroscopes system for micro-3D inspection is presented in this research. Because the image fiber has many advantages like direction changing and long distance transmitting without extra optics, this system also adopts it to project the structured light instead of the pure optical systems. Thus, the measurement head is very small, the measurement distance and orientation could be changed expediently. Experiments showed this is a useful system to measure the 3D profile of meso- to micro-scaled parts, such as the MEMS product. Through choosing appropriate pitch of the structure light, the accuracy and standard deviation σ of the system can reach 5μm and 2μm.
Subjects
相移法
光纖傳像束
微三維形貌
phase-shifting method
Image fiber bundle
Micro 3D profile
Type
thesis
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