New fabrication method for high-Q MEMS inductors

Journal

ASME International Mechanical Engineering Congress and Exposition

Journal Volume

9

Journal Issue

PARTS A AND B

Pages

919-923

Date Issued

2012

Author(s)

Kuo, W.-C.

Hsu, C.-Y.

Yang, Y.-J.

DOI

10.1115/IMECE2012-89169

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448488

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84887279914&doi=10.1115%2fIMECE2012-89169&partnerID=40&md5=e5a63b3966ebd9dcb897ce22d31de9f8

Type

conference paper