Stitching technology using hybrid actuators in nano imprint

Journal

ASME Design Engineering Technical Conference

Journal Volume

4

Pages

683-687

Date Issued

2008

Author(s)

DOI

10.1115/DETC2008-49260

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-81155123717&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/338166

Type

conference paper