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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Stitching technology using hybrid actuators in nano imprint
Details
Stitching technology using hybrid actuators in nano imprint
Journal
ASME Design Engineering Technical Conference
Journal Volume
4
Pages
683-687
Date Issued
2008
Author(s)
JIA-YUSH YEN
DOI
10.1115/DETC2008-49260
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-81155123717&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/338166
Type
conference paper