The Simulations and Analysis of Optical-shutter-type MEMS VOAs
Date Issued
2005
Date
2005
Author(s)
Hung, Shao-Hsuan
DOI
en-US
Abstract
Micro-electro-mechanical Systems (MEMS) technology has been demonstrated to make reliable components for fiber-optic communications. Optical MEMS devices can operate at a higher speed than traditional optomechanical ones. A variable optical attenuator is one of the important devices for optical communications systems. In this thesis, I will talk about optical-shutter-type MEMS VOAs.
This thesis consists of four parts:
1.Introduce VOAs and review different kinds of VOAs based on different principles.
2.Discuss the basis of MEMS fabrication process and micromachining.
3.Show the fabrication process of our VOA and the measurement results.
4.Discuss the mechanical and optical simulation models of our VOA and go through the principles behind the simulation. Based on the results of the mechanical and optical simulation, the dynamic range of attenuation versus current can be obtained.
It is found that the theoretical calculations agree well with experimental results.
Subjects
微機電系統
可變式光衰減器
MEMS
VOA
Type
thesis