Laser Linear Encoder with both High Fabrication and Head-to-scale Tolerances
Resource
Applied Optics 46 (16): 3169-3176
Journal
Applied Optics
Journal Volume
46
Journal Issue
16
Pages
3169-3176
Date Issued
2007
Date
2007
Author(s)
Abstract
We introduce a new configuration for the optical head of a newly developed diffractive laser encoder system. This configuration has a high manufacturing tolerance and a high head-to-scale alignment tolerance, both of which can enhance the wider potential applicability of this newly designed laser encoder. The measurement principles of the encoder are discussed and detailed. We optimized the grating shape and analyzed the impact of the optical components and their arrangement on the measurement error. The head-to-scale alignment tolerance and the arrangement of components in the encoder were also determined. Finally, the measurement performance was evaluated and analyzed. Under nonenvironmentally controlled conditions, the measurement accuracy was found to be 37.3 nm with a standard deviation of 25.4 nm. © 2007 Optical Society of America.
Other Subjects
Diffractive optics; Error analysis; Laser applications; Diffractive laser encoder systems; High fabrication; Laser encoders; Laser linear encoders; Signal encoding
Type
journal article
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