Thermal Sensing Circuit for 30 THz Sensing System Using CMOS Process
Date Issued
2009
Date
2009
Author(s)
Yang, Sin-Han
Abstract
We design a THz sensing system using 0.18 micron CMOS process. Here we use the bolometer approach because the maximum gain frequency of 0.18 micron CMOS is not enough for micron wavelength detector. A thermal sensor is designed in CMOS process to replace the bolometer in other process. THz signal is received by an antenna and the power of THz beam is translated to heat by a matched load. The thermal sensor senses the change of temperature and output a respond voltage level. Therefore, the THz signal is obtained. In this report, the design of antenna in 10.6 micron wavelength is shown and the thermal analysis using FEM software is demonstrated. The measurement environment is setup. Finally, two pictures of spatial response in horizontal polarization and vertical polarization are got. The absorbing ability of THz wave in antennas and different metal structure can be seen.
Subjects
CMOS
terahertz
thermal sensor
spatial response
infrared
Type
thesis
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