Research for Measurement of Ti-Ni Shape Memory Alloy Thin Film And Processes of Non-Valve Ti-Ni Thin Film Micropump
Date Issued
2005
Date
2005
Author(s)
Wang, Weu-Hua
DOI
zh-TW
Abstract
This thesis focuses on physics properties measurement of Ti-Ni thin film and We designd processes of non-valve shape memory alloy thin film micropump. We used Ti-Ni thin film as actuating source and the diffuser is the main part of micropump’s flow channels.
We used Scanning Electron Microscope to observe the cross section of Ti-Ni thin film, Differential Scanning Calorimeter to measure the transformation temperature of Ti-Ni thin film, EDS to do the composition qualitative analysis of Ti-Ni thin film, Electron Probe X-ray Microanalysis to do the precise composition quantitative analysis of Ti-Ni thin film, clamp apparatus designed for Ti-Ni thin film to do qualitative analysis of Ti-Ni SME property under pressure.
We also designed diffuser components as a part of our flow channels. We used FEM software to analyze the inner stress of the thin film under pressure 0.1MPa. In this thesis, we brought up the non-valve micropump processes in detail. Finally, we use anodic bonding technics to assemble the flow channels and the actuation chamber together.
Keywords：Shape Memory Alloy, Shape Memory Effect, Diffuser, Anodic Bonding
Subjects
鈦鎳形狀記憶合金
Ti-Ni Shape Memory Alloy Thin Film
Type
thesis
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