Fiber image techniques in digital stereomicroscopy
Resource
Measurement Science Technology,16.
Journal
IEEE International Conference on Mechatronics 2005 ICM 05
Pages
295-300
Date Issued
2005-01
Date
2005-01
Author(s)
Fan, Kuang-Chao
Li, Ruijun
Song, Hsin-Ming
Yeh, Koung-Ming
Abstract
On the basis of the principle of structured light and phase shifting, a novel digital stereomicroscopes system for micro-3D inspection is presented in this paper. Because the image fiber has many advantages like direction changing and long distance transmitting without extra optics, this system also adopts it to project the structured light instead of the pure optical systems. Thus, the measurement head is very small, the measurement distance and orientation could be changed expediently. Experiments showed this is a useful system to measure the 3D profile of meso- to micro-scaled parts, such as the MEMS product.
Type
journal article