Design and Development of a Valveless One-side Actuating Micropump
Date Issued
2009
Date
2009
Author(s)
Huang, Chih-Wei
Abstract
In this study, a newly designed micropump, valveless one-side actuating piezoelectric micropump, has been successfully developed to actuate liquid in one direction. The micropump consisting of a primary chamber and a secondary chamber is fabricated in an aluminum case by using highly accurate CNC machine. The dimensions of the primary chamber and secondary chamber are 45 mm ? 28 mm ? 4 mm and 7 mm ? 20 mm ? 4 mm, respectively. The actuator of the micropump is fixed on the top of primary chamber with a PDMS diaphragm at one side of the pump case. To earn a net flow rate, the secondary chamber covered by a PDMS diaphragm can vibrate as a valve for controlling the flow direction in the outlet. Also, a well known flow-direction device, nozzle/diffuser, is designed to enhance the pump flow rate in the inlet. The experimental results indicate that the performance of the micropump is dominated by the actuating frequency and voltage of the piezoelectric device, the thickness of the PDMS diaphragm, and the dimensions of the primary chamber. The maximum flow rate of the valveless micropump is 1.128 mL/s at 180 Hz with a 43-mm-length primary chamber; while the maximum pump head can reach 1522.5 Pa by using a 0.5-mm-thickness and a 0.3-mm-thickness diaphragm on the primary chamber and the secondary chamber. In addition, under damping effect is observed in the primary chamber, when the chamber height is reduced from 4 mm to 1 mm.
Subjects
One-side actuation
Piezoelectric device
Flow-direction device
Valveless micropump
Type
thesis
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