利用磁控濺鍍法於CoCrNiSi_(0.3)表面沉積CrN以改善腐蝕及磨耗性質之研究
Journal
金屬熱處理
Journal Issue
157
Start Page
12
End Page
20
Date Issued
2023-06
Author(s)
Abstract
CoCrNiSi_(0.3)中熵合金具有良好的強度和延展性，但在磨耗及腐蝕性能方面仍有改善空間。因此，本研究透過熱處理後並於表面沉積CrN膜層以針對其磨耗及腐蝕性能方面進行改善。在經一系列的熱處理過後，測得於900°C下退火並持溫30分鐘，具有最適當的晶粒大小（17.5 μm），並具有最佳的磨耗及腐蝕性質。再於表面沉積CrN膜層，研究結果發現沉積CrN膜層，隨著沉積時間增加將使膜層的厚度增加，使其不易遭腐蝕液腐穿至底材而提高抗蝕性。且隨著沉積時間增加，其柱狀晶晶粒也逐漸發生細化，使沉積時間3小時的CrN膜層同時具有最佳之磨耗及腐蝕性質。
CoCrNiSi_(0.3) medium-entropy alloy has good strength and ductility, but there is still room for improvement in wear and corrosion properties. Therefore, in this study, a CrN film was deposited on the surface after heat treatment to improve the wear and corrosion performance. After a series of heat treatments, it is measured that annealing at 900°C for 30 minutes has the best grain size (17.5μm) and wear and corrosion properties. Then a CrN film layer was deposited on the surface. The results found that the thickness of the deposited CrN film will increase as the deposition time increases, making it less likely to be corroded by the corrosive solution to the substrate and improving the corrosion resistance. And as the deposition time increases, the columnar crystal grains are gradually refined so that the CrN film with a deposition time of 3 hours has the best wear and corrosion properties.
Subjects
CoCrNiSi_(0.3)
磁控濺鍍
CrN鍍層
磨耗
腐蝕
Magnetron Sputtering
CrN Coating
Wear
Corrosion
Type
journal article