In-situ Ga 2 O 3 process for GaAs inversion/accumulation device and surface passivation applications

Journal

International Electron Devices Meeting 1995

Pages

383-386

Date Issued

1995

Author(s)

Passlack, Matthias

Mannaerts, Joseph P

Chu, SNG

Opila, Robert L

Moriya, Netzer

URI

Type

conference paper