Design of a digital controller for long-stroke submicron positioning stage
Resource
Proc. Of the 1st ICPT, Hamamatsu, Japan(2004.6)
Journal
Proc. Of the 1st ICPT, Hamamatsu, Japan(2004.6)
Pages
-
Date Issued
2004-06
Date
2004-06
Author(s)
Fan, K.C.
Type
conference paper