Development of a low-cost micro-CMM for 3Dmicro/nano measurements
Resource
Meas. Sci. Technol. 17, 524–532
Journal
Meas. Sci. Technol. 17, 524–532
Pages
-
Date Issued
2006
Date
2006
Author(s)
Fan, K.C.
Fei, Y.T.
Yu, X.F.
Chen, Y.J.
Wang, W.L.
Chen, F.
Liu, Y.S.
DOI
246246/2006111501211826
Abstract
A high-precision & low-cost micro-CMM (coordinate measuring machine) is under development. The expected measuring range is 25 × 25 × 10 mm3 & the resolution is 1 nm. In order to enhance the structural accuracy, some new ideas are integrated into the design, such as the arch-shape bridge for better stiffness & thermal accuracy, & the co-planar stage for less Abbe error. The linear diffraction grating interferometer & subdivision technique is proposed for position sensing to nanometre resolution. The focusing probe on the laser interferometer feedback spindle is structured in the Z-axis to guarantee the nanometre stability. In this report, the detailed design principles of the developed micro-CMM are described. The performance evaluation of each module of the prototype micro-CMM is presented. The positioning resolution of each axis to 1 nm can be achieved by combining the coarse & fine motion control on a piezo-ceramic linear motor. The Z-axis measurement can be controlled to within 15 nm repeatability. Parts of the positioning repeatability of the co-planar stage have been achieved to 30 nm. Some problems due to current techniques will be addressed.
Subjects
Micro-CMM
nanometre accuracy
arch bridge
co-planar stage
focusing probe
Publisher
Taipei:National Taiwan University Dept Phys
Type
journal article
File(s)![Thumbnail Image]()
Loading...
Name
1441.pdf
Size
1.86 MB
Format
Adobe PDF
Checksum
(MD5):763cfc81d92eb3fd5ad6460b0524974a