Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry

Journal

Advanced Optical Technologies

Journal Volume

3

Journal Issue

4

Pages

407-416

Date Issued

2014

Author(s)

Tapilouw, A.M.

Chen, L.-C.

Xuan-Loc, N.

Chen, J.-L.

LIANG-CHIA CHEN

DOI

10.1515/aot-2014-0031

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447840

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84941885536&doi=10.1515%2faot-2014-0031&partnerID=40&md5=87a8931267bc8432ea181e1669bdb5e3

Type

journal article