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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A Micromirror Module using an MEMS Digital to Analog Converter and its Application for Optical Surface Profiling
Details
A Micromirror Module using an MEMS Digital to Analog Converter and its Application for Optical Surface Profiling
Journal
Journal of Micromechanics and Microengineering
Journal Volume
20
Date Issued
2010
Author(s)
H.-H. Liao
Y.-J. Yang
YAO-JOE YANG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587866
Type
journal article
