利用奈米壓印機台研究結構化金屬膜的異常穿透現象
Other Title
Investigation of Extraordinary Transmission in Textured Metal Films Using Nano-Imprinting Machine
Journal
科儀新知
Journal Issue
167
Start Page
55
End Page
63
ISSN
1019-5440
Date Issued
2008-12
Author(s)
Abstract
在本文中筆者提出一種奈米壓印的方式，稱之為奈米直印金屬技術，此技術能夠輕易的直接在金屬薄膜上定義各種圖形，包括連續波浪金屬膜或金屬矩陣洞列。利用奈米直印金屬技術製作出的週期性金屬薄膜結構，很適合用來研究表面電漿共振所引發的異常穿透現象。表面電漿共振使得入射光能夠從結構化金屬膜的一側穿過金屬耦合至另一側，因而大幅度在特定波段提高其穿透率。該技術因為能夠利用結構週期控制穿透光的工作波段，以及利用壓印壓力控制穿透光強度，是一個非常有潛力製作彩色濾光片並應用於各式光電元件的技術。
In this paper, we describe a thermal embossing imprint method, named as ”nano-imprinting in metal” (NIM), for patterning metal films with a variety of profiles. Metal films exhibiting either perforated hole-arrays or corrugated structures with various surface morphologies can be fabricated rapidly. The SPR phenomenon allowed energy coupling to the other side of the textured metal film, causing a dramatic increase in the transmission. As a technique for readily controlling the working wavelength and transmittance, the NIM method has great potential for application in various optoelectronic devices.
Type
journal article