Simulation and fabrication of magnetic rotary microgenerator with multipolar Nd/Fe/B magnet
Journal
Microelectronics Reliability
Journal Volume
47
Journal Issue
12
Pages
2129-2134
Date Issued
2007
Author(s)
Abstract
This study presents a high power rotary-type electromagnetic microgenerator with multilayer planar copper (Cu) microcoil and multipolar hard magnet of Nd/Fe/B. The size of this microgenerator is smaller than 1 cm3 in volume. It can achieve the goal of compact integrated system. The induced voltage is simulated by FEMLAB and MATLAB software to solve the coupling problem, which involves in kinetic and electric issues. The multilayer microcoil is fabricated by MEMS process (micro-electro mechanical system), and the multipolar magnet is fabricated using sintering process. The sintered Nd/Fe/B exhibits an excellent hard magnet with Br of 1.44 T and Hc of 975 kA/m. Next, the multipolar magnet rotates relative to planar microcoil to induce electric current. The preliminary result shows that maximum induced voltage of 111.2 mV and maximum power of 386.42 μW can be achieved. Besides, the experimental result is compared with simulated one. © 2006 Elsevier Ltd. All rights reserved.
SDGs
Type
journal article