Development of a flexure hinge-based stack-type 5 DOF coplanar nanometer-scale stage
Journal
AES-ATEMA International Conference Series - Advances and Trends in Engineering Materials and their Applications
Pages
307-311
Date Issued
2007
Author(s)
Abstract
This paper concentrates on the design and manufacturing process of a flexure hinge-based stack-type 5 DOF coplanar nanometer-scale stage with high accuracy and multiple DOF. This paper uses the features of a flexible structure to develop a coplanar nanometer-scale stage with 5 DOF that allows the increase or decrease of axis action in accordance with various needs. The flexible structure of the coplanar nanometer-scale stage was included two kinds of the cylindrical flexible body and arc flexible body. The coplanar nanometer-scale stage allows for 3-translational and 2-rotational motions and is provided with eight piezoelectric actuators - one on the X-axis, another on the Y-axis, and the others on the Z-axis. The displacement characteristics of the output member of the stage were measured with the built-in capacitive sensors. ? AES-Advanced Engineering Solutions.
Subjects
Capacitive sensor
Displacement characteristic
Flexible bodies
Flexure hinge
Manufacturing process
Nano-meter-scale
Piezoelectric
Positioning control
Flexible structures
Piezoelectric actuators
Hinges
Type
conference paper