Design of a Monolithic Optoelectronic Displacement Sensor System and Research on Its Characteristic
Date Issued
2004
Date
2004
Author(s)
Cheng, Chin-Yu
DOI
zh-TW
Abstract
The aim of this thesis is to develop an optoelectronic displacement sensor system for small-scale objects. Besides the compactness of the system, the high-speed and precision displacement sensing performances are also the important points of this thesis. To make a high compactness and precision system possible, the system will be made in the form of monolithic type to make sure that all elements are set stably and precisely. In the developing process, choosing the suitable small-diameter laser source according to the system request is the first thing. The laser beam will be transmitted to the displacement sensing area by the appropriate setup of optical elements. The light intensity of the laser beam and the bright/dark area will vary with the displacement of the sensing object, and be sensed by the optoelectronic sensors to output the corresponding electrical analog signal. To improve the precision of the senor system and reduce the interference of the random noise, the differential measurement method is employed. The bright area that varies with the displacement of the sensing object will be projected onto both optoelectronic sensors by using a prism. The differential output signal of the two sensors is considered to be the output signal of the displacement sensor system. Besides the static and dynamic characteristics test of the sensor system, the system error will also be detail conferred. In the system dynamic test, the result will be compared with the data of the LVDT displacement measurement system to check the performance characteristics.
Subjects
位移感測
雷射光源
光電感測元件
遮斷效應
差動式
laser
optoelectronic sensor
masking effect
displacement sensing
differential
Type
thesis
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