A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method

Resource

Sensors and Actuators A: Physical 143 (2): 469-474

Journal

Sensors and Actuators A: Physical

Journal Volume

143

Journal Issue

2

Pages

469-474

Date Issued

2008

Date

2008

Author(s)

Wang, Xuan-Yu

Lee, Chi-Yuan

Peng, Cheng-Jien

Chen, Pei-Yen

DOI

URI

File(s)

Name

17.pdf

Size

1.02 MB

Format

Adobe PDF

Checksum

(MD5):2685182b4c2a295d09fe33e564d4177a