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College of Electrical Engineering and Computer Science / 電機資訊學院
Computer Science and Information Engineering / 資訊工程學系
Wafer map failure pattern recognition and similarity ranking for large-scale data sets
Details
Wafer map failure pattern recognition and similarity ranking for large-scale data sets
Journal
IEEE Transactions on Semiconductor Manufacturing
Journal Volume
28
Journal Issue
1
Pages
1-12
Date Issued
2015
Author(s)
Wu, M.-J.
Jang, J.-S.R.
Chen, J.-L.
JYH-SHING JANG
DOI
10.1109/TSM.2014.2364237
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84922505720&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/392012
SDGs
[SDGs]SDG9
Type
journal article
