Modeling and emulation of a furnace in IC fab based on colored-timed petri net

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

11

Journal Issue

3

Pages

410-420

Date Issued

1998

Author(s)

Lin, S.-Y.

Huang, H.-P.

DOI

10.1109/66.705376

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447412

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032138478&doi=10.1109%2f66.705376&partnerID=40&md5=283502ab96645198427a903bae1d2107

Type

journal article