AFM pickup head with holographic optical element (HOE)

Journal

IEEE/ASME International Conference on Advanced Intelligent Mechatronics

Pages

442-446

Date Issued

2010

Author(s)

Juang, B.-J.

Huang, K.-Y.

Liao, H.-S.

Leong, K.-C.

HSIEN-SHUN LIAO

KUANG-YUH HUANG

DOI

10.1109/AIM.2010.5695758

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447526

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-79951633703&doi=10.1109%2fAIM.2010.5695758&partnerID=40&md5=3539e8564d9c49e4fe059b3c17ae0542

Type

conference paper