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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Precision robust control for a three dimensional PZT stage
Details
Precision robust control for a three dimensional PZT stage
Journal
SICE Annual Conference
Pages
474-479
Date Issued
2013
Author(s)
JIA-YUSH YEN
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84888601766&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/377699
Type
conference paper