Eliminating the surface inversion layer under the field oxide by low pressure rapid thermal annealing

Journal

Journal of the Electrochemical Society

Journal Volume

141

Journal Issue

9

Pages

2498-2502

Date Issued

1994

Author(s)

DOI

10.1149/1.2055150

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0028497229&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/307553

Type

journal article