Research on the Interactions between Annular Nanostructure Surfaces and Surface Plasmon - Fabrication and Integration of a Three-Dimensional Subwavelength Optical Head and Nanowriter System
Date Issued
2005
Date
2005
Author(s)
Cheng, Tsung-Dar
DOI
zh-TW
Abstract
This thesis concentrated its focus on the directionality of the output transmission through a subwavelength annular aperture even though the directionality issue remains active considering the many papers published in the last few years. In the past three years, the NTU Nano-Bio MEMS Group has made many progresses in the Nanowriter project funned by the Material Research Laboratory, Industrial Technology Research Institute, Taiwan. The main target of this thesis is to fabricate an optical head for nanowriter system with a subwavelength annular aperture and periodic annular structure on a glass substrate.
This thesis includes using surface plasma theory to explain the mechanism of directionality phenomena, fabrication process of metal films with subwavelength surface structure on a glass substrate, observation of transmission light beam in far field. Both Finite Element Method (FEM) and Rigorous Coupled Wave Analysis (RCWA) were used to simulate electromagnetic filed distribution of transmission light beam from near-field to far field. Finally, the implementation of the above-mentioned technologies of nanowriter system was detailed.
The experimental results confirmed that the metal films with subwavelength surface structure on a glass substrate had directionality of output transmission as that of the pure metal film case published previously. In addition, the three-dimensional optical head fabrication processes was developed. By using simulation software and the fabrication processes, the optical head satisified the need of the nanowriter system had been designed successfully, and the output transmission was measured by using an optical microscope.
Future works of this thesis are to confirm the output power and the spot size of output beam of optical head by using NSOM and simulation software and to exposure lines with width close to diffraction limit in ambient conditions.
Subjects
奈米直寫儀
三維次波長表面結構
有限元素分析
Nanowriter system
Three-dimensional subwavelength surface structures
Finite element analysis
Type
thesis
File(s)![Thumbnail Image]()
Loading...
Name
ntu-94-R92543011-1.pdf
Size
23.53 KB
Format
Adobe PDF
Checksum
(MD5):78dd7f9815e2dd1dde11bd1d5cdbed31