Design and performance verification of a microscope-based interferometer for miniature-specimen metrology

Journal

Optical Engineering

Journal Volume

44

Journal Issue

8

Date Issued

2005

Author(s)

Lee, C.-K.

Wu, W.-J.

Wu, G.-Y.

Li, C.-L.

Chen, Z.-D.

DOI

10.1117/1.2010147

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/452055

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33644786784&doi=10.1117%2f1.2010147&partnerID=40&md5=27e866d49e2ffa745c0d1ce5d8200439

Type

journal article