The Fabrication and Thermal Radiation Spectra of Metallic box with Micrometer Scale
Date Issued
2007
Date
2007
Author(s)
Lee, Kuo-Wei
DOI
zh-TW
Abstract
Since light bulb was invented, lighting has become an essential part of the human civilization advancing towards a new century. Accompany with the unceasing development and advancement of science and technology, light-bulb’s life-span is extended and its brightness is increases. However, the great part of energy from the light bulb is heat. Traditional lights, which use tungsten lamp as the source of light, are not energy efficient in terms of life span and energy consumption. To make efficient use of energy for light, we investigate a microstructure to enhance specific signal of thermal radiation spectrum, named “metallic box”.
We design and fabricate metallic box structures with dielectric cube wrapped by metal on the silicon wafer. Applying the theorem of cavity resonance through Maxwell’s equations and boundary conditions, we can calculate the specific spectrum of the component. The allowable EM waves are called resonance modes and the corresponding wavelengths are called resonance wavelengths.
We had tried the imprint technology to fabricate the metallic box, including hot embossing and Laser pulse assisted imprint lithography, the whole process made by standard VLSI process such as exposure, development, dry etch, and evaporation. We could not fabricate the metallic box accurately by the imprint technology. So we use the conventional lithography technology to accomplish the metallic box.
Our metallic boxes have simple resonant cavity structure for a complete simulation for verification of our design. The dimension of the dielectric cubes is designed to be 1μm、2μm、3μm in square, and their height is 150nm or 200nm. After simulating the metallic box with such dimensions, we prove the feasibility of metallic box preliminarily
We can vary the dimension of metallic box to change the spectrum of thermal radiation. In infrared band, we can approximately match the experiment and the simulation. It is expected that we can enhance the signal in visible light band for future illumination and optical applications using this concept.
Subjects
金屬盒子
壓印
空腔共振
微影
metallic box
imprint
cavity resonance
lithography
SDGs
Type
thesis