Vibration measurement and suppression for laser galvanometers using a micro-electromechanical system-based accelerometer

Journal

Sensors and Materials

Journal Volume

30

Journal Issue

11

Pages

2401-2418

Date Issued

2018

Author(s)

Chou, P.-H.

Hsu, Y.-L.

Yang, S.-C.

Chang, H.-C.

Kuo, Y.-C.

Chiu, L.-F.

Chen, Y.-T.

DOI

10.18494/SAM.2018.1976

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448259

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85056198578&doi=10.18494%2fSAM.2018.1976&partnerID=40&md5=c8c676597659e83fe901a50aaad2fcba

Type

journal article