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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Micromachining of mesoporous oxide films for microelectromechanical system structures
Details
Micromachining of mesoporous oxide films for microelectromechanical system structures
Journal
Journal of Materials Research
Journal Volume
17
Journal Issue
8
Pages
2121-2129
Date Issued
2002
Author(s)
SHIH-KANG FAN
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-0036670397&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/298571
Type
journal article