Fabrication of a nano/micro hybrid lens using gas-assisted hot embossing with an anodic aluminum oxide (AAO) template
Resource
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20(7), 075023
Journal
Journal of Micromechanics and Microengineering
Pages
75023
Date Issued
2010
Date
2010
Author(s)
Abstract
This paper reports a novel and effective method for the fabrication of a polymeric nano/micro hybrid lens array. The nanostructure and microlens arrays are fabricated on the same polycarbonate (PC) substrate by hot embossing in sequence. First, an anti-reflection PC film with sub-wavelength nanostructures is fabricated using an anodic aluminum oxide (AAO) template. The anti-reflection characteristic of nanostructures on the PC film is evaluated. Then an array of convex microlenses is formed from the nanostructured PC film using a stainless steel mold with a microhole array. Both processes employ gas-assisted hot embossing to perform the partial protrusion of the film into nano-sized or micro-sized holes in the AAO template and steel mold. The optical property of the microlens has been verified. This proposed technique has proven its potential for effectively fabricating a nano/micro hybrid lens array on a polymeric substrate. © 2010 IOP Publishing Ltd.
Type
journal article
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