The sub-micron hole array in sapphire produced by inductively-coupled plasma reactive ion etching
Journal
Journal of Nanoscience and Nanotechnology
Journal Volume
12
Journal Issue
2
Pages
1641-1644
Date Issued
2012
Author(s)
Shiao, M.-H.
Chang, C.-M.
Huang, S.-W.
Lee, C.-T.
Wu, T.-C.
Hsueh, W.-J.
Ma, K.-J.
SDGs
Type
conference paper